PUB-2015-LTP

Low Temperature Processed Complementary Metal Oxide Semiconductor (CMOS) Device by Oxidation Effect from Capping Layer

​Zhenwei Wang, Hala A. Al-Jawhari, Pradipta K. Nayak, J. A. Caraveo-Frescas, Nini Wei, M. N. Hedhili, H. N. Alshareef, "Low Temperature Processed Complementary Metal Oxide Semiconductor (CMOS) Device by Oxidation Effect from Capping Layer"
​SCIENTIFIC REPORTS, 5, 9617; DOI: 10.1038/srep09617​
Zhenwei Wang, Hala A. Al-Jawhari, Pradipta K. Nayak, J. A. Caraveo-Frescas, Nini Wei, M. N. Hedhili, H. N. Alshareef
Capping Layer, CMOS
2015